Chip embedded package structure

ABSTRACT

A chip embedded package structure is provided. A stiffener is disposed on a tape. The tape has at least an alignment mark and the stiffener has at least a chip opening. A chip having a plurality of bonding pads thereon is disposed on the tape within the chip opening such that the bonding pads face the tape. A plurality of through holes is formed in the tape to expose the bonding pads respectively. After that, an electrically conductive material is deposited to fill the through holes and form a plurality of conductive vias that connects with the bonding pads respectively. A multi-layered interconnection structure is formed on the surface of the tape away from the chip. The multi-layered interconnection structure has an inner circuit that connects to the conductive vias. The inner circuit has a plurality of metallic pads disposed on the outer surface of the multi-layered interconnection structure.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of Taiwan applicationserial no. 93113134, filed on May 11, 2004.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a chip package structure. Moreparticularly, the present invention relates to a chip embedded packagestructure.

2. Description of Related Art

In this electronic age, multi-functional, highly integrated,miniaturized, inexpensive devices with a high processing speed are ingreat demand. To meet this trend, chip packages are also highlyminiaturized and densified. In the conventional ball grid array (BGA)packaging technique, a package substrate is often used as a carrier foran integrated circuit (IC) chip. The chip disposed over the packagesubstrate is electrically connected to the substrate through flip chipbonding or wire bonding. An array of solder balls is also attached tothe bottom surface of the package substrate. Hence, the chip is able toelectrically connect with the electronic devices in another level suchas a printed circuit board through an inner circuit within the packagesubstrate and the solder balls at the bottom of the package substrate.

However, the BGA packaging technique needs to deploy a package substratewith a high layout density and electrically connect using either theflip chip or wire bonding technique. Hence, the signal transmissionpathway is slightly longer. To reduce the transmission pathway, a chipembedded package structure having a bump-less build-up layer (BBUL) hasbeen developed. In the chip embedded package, the step of connecting achip to a package substrate through flip-chip or wire bonding isunnecessary. This is because a multi-layered interconnection structureis directly formed on the active surface of the chip and an array ofcontacts such as solder balls or pins for connecting with higher levelelectronic devices is directly formed on the multi-layeredinterconnection structure thereafter.

FIGS. 1A through 1F are schematic cross-sectional views showing thesteps for forming a conventional chip package. First, as shown in FIG.1A, a tape 110 and a stiffener 120 are provided. The stiffener 120 isattached to the tape 110 for increasing the structural strength and heatdissipating capability of the subsequently formed package. The stiffener120 has a chip opening 122 for accommodating a chip 130 (shown in FIG.1B) and the tape 110 covers the bottom end of the chip opening 122.

As shown in FIGS. 1B and 1C, a chip 130 having a plurality of bondingpads 134 on an active surface 132 is attached to the tape 110 within thechip opening 122. Thereafter, an encapsulating compound 140 is depositedto fill the chip opening 122 between the chip 130 and the stiffener 120.The tape 110 serves as a means of positioning and supporting the chip130 inside the chip opening 122 before the chip 130 is properly fixed bythe encapsulating compound 140. After fixing the position of the chip130, the tape 110 is torn away and cleaned to ensure no residual taperemains.

As shown in FIG. 1D, a build-up process is performed to produce amulti-layered interconnection structure 150 on the active surface 132 ofthe chip 130 and the surface of the stiffener 120. The multi-layeredinterconnection structure 150 comprises a plurality of patterned circuitlayers 152, at least a dielectric layer 154 and a plurality ofconductive blind vias 156. The circuit layers 152 are sequentiallystacked over the active surface 132 of the chip 130 and the surface ofthe stiffener 120 and connected to the bonding pads 134 of the chip 130.Each dielectric layer 154 is disposed between two neighboring circuitlayers 152. Furthermore, the conductive blind vias 156 pass through oneof the dielectric layer 154 and at least electrically connect twocircuit layers 152 together. The circuit layers 152 and the conductiveblind vias 156 together form an inner circuit 158. The inner circuit 158also has a plurality of metallic pads 159 exposed on the outer surfaceof the multi-layered interconnection structure 150.

As shown in FIG. 1E, a solder mask layer 160 is formed over themulti-layered interconnection structure 150. The solder mask layer 160has a plurality of openings 162 that exposes the metallic pads 159respectively.

As shown in FIG. 1F, a layer of pre-soldering material is printed overthe openings 162 of the solder mask layer 160. Thereafter, a pluralityof conductive pins 180 is bonded to the pre-soldering material 170 toform a complete chip package structure 100.

The aforementioned process of forming the package has the followingdrawbacks. The tape needs to be torn away and the surface needs to becleaned so that the process is complicated but trivial. Moreover, aftertearing the tape away from the chip and the stiffener, coplanaritybetween the chip and the stiffener is hard to maintain. Ultimately, thismay reduce the reliability of the subsequently formed multi-layeredinterconnection structure. In addition, no alignment marks are set upfor performing laser drilling or photolithographic process during thefabrication of the multi-layered interconnection structure. Without anyalignment mark to enhance processing accuracy, it is difficult toincrease the overall yield of the packaging.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to a chip embeddedpackage structure capable of shortening the processing time, increasingpositional accuracy, improving structural coplanarity and packagereliability, and yield of the packaging.

The present invention is directed to a chip embedded package structurecomprising a tape, a stiffener, at least a chip and a multi-layeredinterconnection structure. The tape comprises at least a first alignmentmark located on the surface. The tape also comprises a plurality ofconductive vias disposed inside passing through the tape. The stiffeneris disposed on the tape and comprises at least a chip opening. The chipcomprises an active surface having a plurality of bonding pads formedthereon. The chip is disposed on the tape inside the chip opening suchthat the active surface of the chip faces the tape. The bonding pads areelectrically connected to the conductive vias respectively. Themulti-layer interconnection structure is disposed on the tape away fromthe chip. The multi-layer interconnection structure comprises an innercircuit connected to the conductive vias. Furthermore, the inner circuitcomprises a plurality of metallic pads on the outer surface of theinter-layer interconnection structure away from the tape.

In brief, alignment marks are pre-fabricated on the tape in the presentembodiment of the present invention so that the alignment marks can beused to attach the chip, form the conductive vias and fabricate themulti-layered interconnection structure. Furthermore, there is no needto remove the tape throughout the packaging process. Consequently, theprocessing time of the package is reduced, the positioning accuracy andyield are increased and the structural coplanarity and reliability ofthe package are improved.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary, and are intended toprovide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the invention, and are incorporated in and constitute apart of this specification. The drawings illustrate embodiments of theinvention and, together with the description, serve to explain theprinciples of the invention.

FIGS. 1A through 1F are schematic cross-sectional views showing thesteps of forming a conventional chip package.

FIGS. 2A through 2G are schematic cross-sectional views showing thesteps of fabricating a chip embedded package structure according to oneembodiment of the present invention.

FIG. 3 is a block diagram of an electronic system according to oneembodiment of the present invention.

DESCRIPTION OF EMBODIMENTS

Reference will now be made in detail to the present preferredembodiments of the invention, examples of which are illustrated in theaccompanying drawings. Wherever possible, the same reference numbers areused in the drawings and the description to refer to the same or likeparts.

FIGS. 2A through 2G are schematic cross-sectional views showing thesteps of fabricating a chip embedded package structure according to oneembodiment of the present invention. First, as shown in FIG. 2A, a tape210 is provided. The tape 210 is a polyimide (PI) tape, for example. Thetape 210 comprises at least an alignment mark 212 (four alignment marksin the illustration) on the surface of the tape 210. These alignmentmarks 212 are not limited to any one side of the tape 210. In general,the alignment marks 212 can be disposed on both sides of the tape 210.

The tape 210 may further comprise a circuit layer 216 disposed on asurface that will not come in contact with a subsequently attached chip240 as shown in FIG. 2C for a redistribution of the connections betweenconductive vias 260 and an inner circuit 272 as shown in FIG. 2F. Thealignment mark 212 is formed, for example, by depositing a material overthe tape 210 to form a material layer (not shown) and performingphotolithographic and etching processes to pattern the material layer.The material layer is fabricated using a metal or other material thatcan be easily identified by a processing equipment. It should be notedthat the alignment marks 212 and the circuit layer 216 could befabricated together as a conductive pattern (unlabeled). The conductivepattern is formed, for example, by performing photolithographic andetching processes.

As shown in FIG. 2B, a stiffener 220 having at least a chip opening 222is attached to the tape 210. The stiffener 220 needs to have sufficientmechanical strength and heat-dissipating capability for protecting thesubsequently formed chip 240. The stiffener 220 and the tape 210 arebonded together using an adhesive layer 230, for example. Meanwhile, thecircuit layer 216 is located on the surface of the tape 210 away fromthe stiffener 220.

As shown in FIG. 2C, a chip 240 is attached to the tape 210 inside thechip opening 222 of the stiffener 220. The chip 240 comprises an activesurface 242 with a plurality of bonding pads 244 formed thereon. Theactive surface 242 of the chip 240 is attached to the tape 210. The chip240 is bonded to the tape 210 through the adhesive layer 230, forexample. When the chip 240 is bonded to the tape 210 through theadhesive layer 230, the alignment marks 212 can be used as a referencefor accurately positioning the chip 240 inside the chip opening 222.After positioning the chip 240 inside the chip opening 222, anencapsulating compound 250 is deposited to fill the remaining chipopening 222 between the chip 240 and the stiffener 220. Hence, thelocation of the chip 240 is firmly fixed within the chip opening 222 sothat relative shifting between the chip 240, the stiffener 220 and thetape 210 is minimized. With the chip 240 fixed in position, thealignment mark 212 on the tape 210 instead of the chip 240 can be usedas a reference. Furthermore, a curing process can be carried out afterfilling the chip opening 222 with the encapsulating compound 250.

As shown in FIG. 2D, a plurality of through holes O1 are formed in thetape 210 by laser drilling, for example. The through holes O1 passthrough the tape 210 and the adhesive layer 230 to expose the bondingpads 244, respectively. When the through holes O1 are formed by laserdrilling, the alignment marks 212 on the surface of the tape 210 awayfrom the chip 240 can be used as a reference directly or indirectlythrough the transparent tape 210 from the side close to the chip 240.Furthermore, an adhesive layer 232 may also form on the surface of thetape 210 away from the stiffener 220 before drilling the through holesO1 so that the through holes O1 also pass through the adhesive layer232.

As shown in FIG. 2E, a conductive material is deposited into the throughholes O1 to form a plurality of conductive vias 260. Each conductive via260 connects with a bonding pad 244. Furthermore, some of the conductivevias 260 also connect with the circuit layer 216 so that the conductivevias 260 can extend to an area outside the active surface 242 of thechip 240.

As shown in FIG. 2F, a multi-layered interconnection structure 270 isformed on the tape 210 on the opposite side of the chip 240. Themulti-layered interconnection structure 270 comprises a plurality ofdielectric layers 276, a plurality of circuit layers 278 and a pluralityof conductive vias 279. The dielectric layers 276 and the circuit layers278 are stacked alternately over each other. The conductive vias 279pass through the dielectric layer 276 for electrically connecting twoneighboring circuit layers 278 or electrically connecting the conductivevias 260 in the tape 210 and the circuit layer 278 closest to the tape210. The circuit layers 278 and the conductive vias 279 together form aninner circuit 272 within the multi-layered interconnection structure270. The circuit layer 278 of the inner circuit 272 furthest from thetape 210 may have a plurality of exposed metallic pads 274. Typically,the multi-layered interconnection structure 270 is formed on the tape210 by a build-up process. The conductive vias 279 for linkingneighboring circuit layers 278 are formed inside laser-drilled openingsO2 in the dielectric layer 276, for example.

As shown in FIG. 2G, a conductive ball 280 or a conductive pin is formedon each metallic pad 274. Here, a conductive ball is used as an example.The conductive balls 280 serve as a final link in the electrical pathwayfrom the bonding pads 244 on the chip 240 through the conductive vias260, the inner circuit 272 and the metallic pads 274 to externaldevices. In addition, some of the electrical signals from the bondingpads 244 may pass through the circuit layer 216 on the way to themetallic pads 274.

As shown in FIG. 2G, some of the alignment marks 212 are located underthe chip opening 222 so that the positioning system of a processingequipment may detect the alignment marks 212 as a reference toaccurately position the chip 240 within the chip opening 222.Furthermore, in the chip embedded packaging process, a tape 210 visibleto the positioning system of the processing equipment may be deployed.Hence, the equipment may see through the tape 210 to detect thealignment mark 212 on the other side of the tape 210 and use thealignment mark 212 as a reference for positioning thereafter. In otherwords, the alignment marks 212 are no longer restricted to any one sideof the tape 210 such as close to the chip 240 or away from the chip 240.In addition, the chip 240 or the laser-drilled holes can be accuratelypositioned by referencing the alignment marks 212.

FIG. 3 is a block diagram of an electronic system according to oneembodiment of the present invention. As shown in FIG. 3, the electronicsystem 300 may be a computer system or a communication system. Ingeneral, the electronic system 300 is used inside a personal computer ora mobile communication device, for example. The mobile communicationdevice includes a mobile phone or a personal digital assistant withmobile communication function. The electronic system 300 is disposed ona circuit board 310 comprising a bus 312, a memory unit 340 and a chipembedded package structure 200. The memory unit 340 and the bus 312 areelectrically connected. Similarly, the chip embedded package structure200 and the bus 312 are electrically connected. The composition of thechip embedded package structure 200 is identical to the chip embeddedpackage structure in the aforementioned embodiment.

In addition, the electronic system 300 further comprises a power supplyunit 330 disposed on the circuit board 310. The chip 240 within the chipembedded package structure 200 is a microprocessor, for example.Alternatively, the electronic system 300 may include an externalmicroprocessor 350, for example.

In summary, the alignment marks are formed on the tape in the presentinvention. Furthermore, there is no need to remove the tape throughoutthe process. Therefore, the alignment marks on the tape can be used toform the laser-drilled through holes in the tape, the laser-drilled orphotolithographic-processed openings in the dielectric layer of themulti-layered interconnection structure or position the chip inside thechip opening with great accuracy. Because the alignment marks on thetape greatly improves the positional accuracy of various processingsteps, a lot of chips can be packaged at the same time so that theprocessing time of the packages is reduced. Furthermore, in the presenceof the tape, the package can have a better structural coplanarity and ahigher reliability.

It will be apparent to those skilled in the art that variousmodifications and variations can be made to the structure of the presentinvention without departing from the scope or spirit of the invention.In view of the foregoing, it is intended that the present inventioncover modifications and variations of this invention provided they fallwithin the scope of the following claims and their equivalents.

1. A chip embedded package structure, comprising: a tape, having atleast a first alignment mark disposed on a surface of the tape, whereinthe tape comprises a plurality of conductive vias passing through thetape; a stiffener, disposed on the tape, wherein the stiffener comprisesat least a chip opening; at least a chip, disposed on the tape insidethe chip opening such that an active surface of the chip faces the tape,wherein the chip also comprises a plurality of bonding pads disposed onthe active surface and the bonding pads are electrically connected tothe conductive vias respectively; and a multi-layered interconnectionstructure, disposed on the surface of the tape away from the chip,wherein the multi-layered interconnection structure comprises an innercircuit connecting with the conductive vias and comprises a plurality ofmetallic pads on a surface of the multi-layered interconnectionstructure away from the tape.
 2. The chip embedded package structure ofclaim 1, wherein the first alignment mark is located under the chipopening.
 3. The chip embedded package structure of claim 1, wherein thefirst alignment mark is located on the surface of the tape on the sameside as the chip.
 4. The chip embedded package structure of claim 1,wherein the first alignment mark is located on the surface of the tapeaway from the chip.
 5. The chip embedded package structure of claim 4,wherein the tape further comprises at least a second alignment markdisposed on the surface of the tape on the same side as the chip.
 6. Thechip embedded package structure of claim 1, wherein the tape isfabricated using a transparent material.
 7. The chip embedded packagestructure of claim 1, wherein the tape further comprises a circuit layerdisposed on the surface of the tape away from the chip and connected tothe conductive vias and the inner circuit.
 8. The chip embedded packagestructure of claim 1, wherein the package further comprises a pluralityof conductive balls disposed on the metallic pads respectively.
 9. Thechip embedded package structure of claim 1, wherein the package furthercomprises a plurality of conductive pins disposed on the metallic padsrespectively.
 10. The chip embedded package structure of claim 1,wherein the package further comprises an encapsulating compound disposedinside the chip opening between the chip and the stiffener.
 11. Anelectronic system for disposing on a circuit board, comprising: a bus; amemory unit, connected to the bus; a chip embedded package structure,connected to the bus, wherein the chip embedded package structurefurther comprises: a tape, having at least a first alignment markdisposed on a surface of the tape, wherein the tape comprises aplurality of conductive vias passing through the tape; at least astiffener, disposed on the tape, wherein the stiffener comprises atleast a chip opening; a chip, disposed on the tape inside the chipopening such that an active surface of the chip faces the tape, whereinthe chip also comprises a plurality of bonding pads disposed on theactive surface and the bonding pads are electrically connected to theconductive vias respectively; and a multi-layered interconnectionstructure, disposed on the surface of the tape away from the chip,wherein the multi-layered interconnection structure comprises an innercircuit that connects with the conductive vias and comprises a pluralityof metallic pads on a surface of the multi-layered interconnectionstructure away from the tape.
 12. The electronic system of claim 11,wherein the first alignment mark is disposed under the chip opening. 13.The electronic system of claim 11, wherein the first alignment mark isdisposed on the surface of the tape on the same side as the chip. 14.The electronic system of claim 11, wherein the first alignment mark isdisposed on the surface of the tape away from the chip.
 15. Theelectronic system of claim 14, wherein the tape further comprises atleast a second alignment mark disposed on the surface of the tape on thesame side as the chip.
 16. The electronic system of claim 11, whereinthe tape is fabricated using a transparent material.
 17. The electronicsystem of claim 11, wherein the tape further comprises a circuit layerdisposed on the surface of the tape away from the chip and connected tothe conductive vias and the inner circuit.
 18. The electronic system ofclaim 11, wherein the chip embedded package structure further comprisesa plurality of conductive balls disposed on the metallic padsrespectively.
 19. The electronic system of claim 11, wherein the chipembedded package structure further comprises a plurality of conductivepins disposed on the metallic pads respectively.
 20. The electronicsystem of claim 11, wherein the chip embedded package structure furthercomprises an encapsulating compound disposed within the chip openingbetween the chip and the stiffener.
 21. The electronic system of claim11, wherein the system further comprises at least a power supply unitthat connects with the bus.
 22. The electronic system of claim 11,wherein the system further comprises a microprocessor connected to thebus.
 23. The electronic system of claim 11, wherein the chip is amicroprocessor.
 24. The electronic system of claim 11, wherein theelectronic system is a computer system.
 25. The electronic system ofclaim 11, wherein the electronic system is a communication chip system.